Semiconductor Technology M.S.
The coursework (following one of two tracks: Device Processing or Materials and Device Characterization) is 5 core courses (18-20 credits) + 3 electives (16-18 credits) + 9 credits for internship for a minimum total of 45 credits.
Track 1: Device Processing
Core Required (18 credits)
| Ph 545 | Microelectronic Devise Fabrication I | 4 |
| Ph 546 | Microelectronic Device Fabrication II | 4 |
| Ph 547 | Microelectronic Device Fabrication III | 4 |
| Ch 545 | Physical Chemistry Laboratory | 2 |
| Stat 551 | Applied Statistics for Engineers and Scientists I | 4 |
3-month internship in the local semiconductor industry (9 credits)
| Ph 504 | Cooperative Education/Internship | 1-9 |
Electives (18 credits)
| Ch 552 | Technology of Photoresist | 4 |
| ME 510 | TOP: THIN FILMS PROCESS TECHNO | 4 |
| ME 513 | Engineering Material Science | 4 |
| ME 528 | Scanning Electron Microscopy for Materials and Device Characterization | 4 |
| ME 577 | Introduction to Semiconductor Manufacturing | 4 |
| Ph 540 | Physics of Solid State Devices | 4 |
| Ph 551 | Electron Microscopy | 4 |
| Ph 581 | Introduction to Nano(materials)-Science and –Engineering | 4 |
| Ph 585 | Experimental Methods in Applied Physics | 4 |
| | | |
| Ch 507 | Seminar | 1-4 |
| | or | |
| Ph 507 | Seminar | 1-4 |
Track 2: Materials and Device Characterization (Metrology)
Core Required (20 credits)
| Ph 545 | Microelectronic Devise Fabrication I | 4 |
| Ph 546 | Microelectronic Device Fabrication II | 4 |
| Ph 547 | Microelectronic Device Fabrication III | 4 |
| Stat 551 | Applied Statistics for Engineers and Scientists I | 4 |
| | | |
| Ph 551 | Electron Microscopy | 4 |
| | or | |
| ME 528 | Scanning Electron Microscopy for Materials and Device Characterization | 4 |
3-month internship in the local semiconductor industry (9 credits)
| Ph 504 | Cooperative Education/Internship | 1-9 |
Electives (16 credits)
| Ch 510 | TOP: ELECTRONIC MATERIALS | 4 |
| Ch 553 | Surface Chemistry | 4 |
| ME 510 | TOP: MATERIAL SURFACE ANALYSIS | 4 |
| ME 512 | Advanced Vibrations | 4 |
| ME 529 | Transmission Electron Microscopy and Chemical Analysis of Materials | 4 |
| Ph 540 | Physics of Solid State Devices | 4 |
| Ph 548 | Electronic materials and device characterization | 4 |
| Ph 552 | Electron Microscopy | 4 |
| Ph 581 | Introduction to Nano(materials)-Science and –Engineering | 4 |
| Ph 585 | Experimental Methods in Applied Physics | 4 |
| Ph 595 | Materials Physics: Structure and Physical Properties of Ordered and Disordered Condensed Matter | 4 |
| | | |
| Ph 507 | Seminar | 1 |
| | or | |
| Ch 507 | Seminar | 1 |
Total Credit Hours: 45