Portland-State-University 2022-2023 Bulletin

ME 538 Fundamentals of MEMS and Microsystems

The underlying principles of physics, mechanics and materials science as they apply to MEMS will be covered and coupled closely with the basic and applied aspects of microsystems engineering. Case studies involving the design, operation, fabrication and packaging of MEMS devices will be presented throughout the class.

Credits

4

Prerequisite

senior or graduate standing.
  • Up one level
  • 500